The phase-shift technology is applied to monochromatic light interferometry measurement, time-average interferometry measurement and white-light vertical scanning interferometry measurement respectively. By this way, phase information of interferometric fringe can be modulated, which is used in the analysis of MEMS dynamic behaviors. 将相移技术分别应用在单色光干涉测量、时间平均干涉测量以及白光垂直扫描干涉测量中,实现了对干涉条纹相位信息的调制,可以用于MEMS器件运动特性的分析中;
In addition, the monochromatic light with two wavelengths is used to produce light intensity signals which are received by CCPD-1024, and which are fed into the computer with Phase method to be disposed, resulting in an analysis of the stess state. 此外,由两种波长的单色光产生的光强信号图可以用双波长位相法在本系统上处理,以便进行应力状态分析。